Keyword Recirculating Chiller Ultra-low Temp Chillers SUNDI series TES series Products

Chillers For Semiconductor Manufacturing

Customized temperature control solutions for your processContact Us

MAIN PRODUCTSCustom products

Semiconductor Chillers

Semiconductor Chillers

High temperature chillers, low temperature chillers and ultra low temperature chillers
Coolant Distribution Units

Coolant Distribution Units

Liquid cooling solutions for data center cooling
Gas Cooling Chillers

Gas Cooling Chillers

For cooling non-corrosive gases
Thermal Chucks & Plates

Thermal Chucks & Plates

It is used for testing RF devices and high-density power devices, and can also be used for rapid cooling of laboratory flat panels.
Direct Cooling Systems

Direct Cooling Systems

Suitable for occasions where the heat exchanger has a small heat exchange area but a large heat exchange capacity
Semiconductor Waste Gas Recycling

Semiconductor Waste Gas Recycling

For condensation, liquefaction and recovery of gases

APPLICATIONS

Electrochemical Thermcells

Electrochemical Thermcells

Electronic Component Testing

Electronic Component Testing

Etching Baths

Etching Baths

IC Chip Testing

IC Chip Testing

Microchips

Microchips

Optoelectronic Devices

Optoelectronic Devices

Process Cooling

Process Cooling

Silicon Wafer Manufacturing

Silicon Wafer Manufacturing

Wet Chemical Etching Baths

Wet Chemical Etching Baths

Wet Chemistry

Wet Chemistry

WHY CHOOSE US

Professional Teams
There are many R&D teams dedicated to the semiconductor industry with decades of manufacturing experience.
Large Production Scale
The total production area is nearly 20,000㎡, and 2,600 pieces of equipment are produced annually.
Strong Sales Ability
Our semiconductor temperature control equipment is sold to various countries around the world and has dealers in many countries.
Many Application Fields
Applied to various steps in semiconductor manufacturing, whether fluid or gas control.
Quality Inspection Team
Provide comprehensive product quality inspection services, and the whole machine 48 hours uninterrupted operation inspection before leaving the factory.
Excellent After-sales Service
24 hours quick response, support remote solution of equipment failure